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635 119 - App of Micro & Nano Fab
Micro-Electro-Mechanical Systems (MEMS) are microscopic moving devices manufactured using computer chip fabrication methods. They have a wide variety of applications including in air bag collision sensors, digital projectors, optical communications, chemical sensors. Students will continue their experience in microfabrication and microelectronics manufacturing to design and manufacture MEMS in the cleanroom.
3.000 Credit hours
18.000 Lecture hours
72.000 Lab hours
Levels: Credit Programs/Classes
Schedule Types: Lab, Lab and Lecture, Lecture
Science, Tech, Engr, & Math Division
Nanotechnology Department