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2015 Spring CEU
Mar 18, 2024
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Information Select the desired Level or Schedule Type to find available classes for the course.

635 108 - Micro and Nano Fabrication
Students will learn atomic structure and the periodic table, particularly as related to semiconductors; the meaning of semiconductor materials, their functions and use; differences between single crystal and polycrystalline materials; operations of diffusion and thin film deposition and how photolithography and masking work in the semiconductor process; oxidation process; etching, including wet and dry etching and photoresist stripping; doping, including diffusion techniques and ion implantation; thin film deposition, including CVD, LPCVD and metallization methods; wafer terminology, testing, evaluation, and yield factors. Supporting lab activity covers the basic process steps to make top-down micro and nanoscaled structures. Specific topics include oxidation, photolithography, electron beam lithography, chemical vapor deposition, etching, rapid thermal annealing, wet chemical etching and plasma etching. Students will build a micro mechanicalstructure as part of the lab.
2.000 Credit hours
36.000 Lecture hours

Levels: Credit Programs/Classes
Schedule Types: Lecture

Science, Tech, Engr, & Math Division
Nanotechnology Department


Prerequisites:
Credit Programs/Classes level 623 108 Minimum Grade of D-

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